Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977376 | Method of prevention charging, and apparatus for charged particle beam using the same | Hiroyasu Shichi, Satoshi Tomimatsu | 2005-12-20 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2005-08-09 |
| 6894287 | Microfabrication apparatus and microfabrication method | Satoshi Tomimatsu, Hiroyasu Shichi, Osamu Watanabe | 2005-05-17 |
| 6858851 | Apparatus for specimen fabrication and method for specimen fabrication | Satoshi Tomimatsu, Hiroyasu Shichi | 2005-02-22 |
| 6838667 | Method and apparatus for charged particle beam microscopy | Ruriko Tsuneta, Masanari Koguchi, Mari Nozoe, Mitsugu Sato | 2005-01-04 |