Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970004 | Apparatus for inspecting defects of devices and method of inspecting defects | Tohru Ishitani, Aritoshi Sugimoto, Isamu Sekihara, Kaoru Umemura, Satoshi Tomimatsu +1 more | 2005-11-29 |
| 6960765 | Probe driving method, and probe apparatus | Satoshi Tomimatsu, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto, Yuichi Hamamura +2 more | 2005-11-01 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2005-08-09 |