Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977376 | Method of prevention charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Satoshi Tomimatsu | 2005-12-20 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2005-08-09 |
| 6894287 | Microfabrication apparatus and microfabrication method | Muneyuki Fukuda, Satoshi Tomimatsu, Osamu Watanabe | 2005-05-17 |
| 6858851 | Apparatus for specimen fabrication and method for specimen fabrication | Satoshi Tomimatsu, Muneyuki Fukuda | 2005-02-22 |