Issued Patents All Time
Showing 26–50 of 101 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8383522 | Micro pattern forming method | Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2013-02-26 |
| 8357619 | Film formation method for forming silicon-containing insulating film | Kazuhide Hasebe, Jun Ogawa | 2013-01-22 |
| 8349401 | Film formation apparatus and method for using same | Jun Sato, Kiyotaka Kikuchi, Hiroki Murakami, Kazuhide Hasebe | 2013-01-08 |
| 8318824 | Hydrophilic polyolefin sintered body | Naoki Matsuoka, Minoru Yamamoto, Takahiro Deguchi | 2012-11-27 |
| 8168375 | Patterning method | Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2012-05-01 |
| 8168270 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa | 2012-05-01 |
| 8124181 | Oxidation method providing parallel gas flow over substrates in a semiconductor process | Kazuhide Hasebe, Takehiko Fujita, Jun Ogawa | 2012-02-28 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7989354 | Patterning method | Kazuhide Hasebe, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7923378 | Film formation method and apparatus for forming silicon-containing insulating film | Kazuhide Hasebe, Jun Ogawa | 2011-04-12 |
| 7906168 | Film formation method and apparatus for forming silicon oxide film | Kazuhide Hasebe, Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa | 2011-03-15 |
| 7795158 | Oxidation method and apparatus for semiconductor process | Takehiko Fujita, Jun Ogawa, Kazuhide Hasebe | 2010-09-14 |
| 7754622 | Patterning method utilizing SiBN and photolithography | Pao-Hwa Chou, Kazuhide Hasebe, Yasushi Akasaka, Mitsuaki Iwashita, Reiji Niino | 2010-07-13 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2010-02-02 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2009-11-24 |
| 7615163 | Film formation apparatus and method of using the same | Akitake Tamura, Tetsushi Ozaki | 2009-11-10 |
| 7565889 | Valve timing control apparatus | Taiyu Iwata, Kenji Fujiwaki | 2009-07-28 |
| 7368384 | Film formation apparatus and method of using the same | Atsushi Endo, Tomonori Fujiwara, Yuichiro Morozumi, Katsushige Harada, Dong-Kyun Choi +2 more | 2008-05-06 |
| 7165521 | Variable valve timing control device | — | 2007-01-23 |
| 7084023 | Method of manufacturing semiconductor device, film-forming apparatus, and storage medium | Dong-Kyun Choi, Tomonori Fujiwara, Hiroaki Ikegawa, Genji Nakamura | 2006-08-01 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Haruhiko Furuya, Dong-Kyun Choi, Takahito Umehara +3 more | 2006-05-09 |
| 7013856 | Valve timing control device | — | 2006-03-21 |
| 7007918 | Valve opening-closing timing control device | Yoshiyuki Kawai, Masaki Kobayashi | 2006-03-07 |
| 6981477 | Valve timing control device | Mitsuru Uozaki | 2006-01-03 |
| 6920853 | Variable valve timing control device | Taiyu Iwata, Ichiro Hiratsuka, Takayuki Kurumi, Kazumi Ogawa | 2005-07-26 |