Issued Patents All Time
Showing 51–75 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8276540 | Method and system for introducing process fluid through a chamber component | Merritt Funk | 2012-10-02 |
| 8100082 | Method and system for introducing process fluid through a chamber component | Merritt Funk | 2012-01-24 |
| 8083961 | Method and system for controlling the uniformity of a ballistic electron beam by RF modulation | Ping Jiang | 2011-12-27 |
| 8038834 | Method and system for controlling radical distribution | Merritt Funk, David V. Horak, Eric J. Strang | 2011-10-18 |
| 7998307 | Electron beam enhanced surface wave plasma source | Paul Moroz | 2011-08-16 |
| 7993937 | DC and RF hybrid processing system | Merritt Funk | 2011-08-09 |
| 7988813 | Dynamic control of process chemistry for improved within-substrate process uniformity | Radha Sundararajan, Merritt Funk | 2011-08-02 |
| 7938081 | Radial line slot antenna having a conductive layer | Paul Moroz | 2011-05-10 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundararajan | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundararajan | 2011-03-01 |
| 7875555 | Method for plasma processing over wide pressure range | Merritt Funk | 2011-01-25 |
| 7875859 | Ion energy analyzer and methods of manufacturing and operating | Lin Xu, Ronald Victor Bravenec | 2011-01-25 |
| 7829469 | Method and system for uniformity control in ballistic electron beam enhanced plasma processing system | Hiromasa Mochiki | 2010-11-09 |
| 7781340 | Method and system for etching high-k dielectric materials | Audunn Ludviksson | 2010-08-24 |
| 7777179 | Two-grid ion energy analyzer and methods of manufacturing and operating | Lin Xu, Ronald Victor Bravenec | 2010-08-17 |
| 7772544 | Neutral beam source and method for plasma heating | Merritt Funk | 2010-08-10 |
| 7765077 | Method and apparatus for creating a Spacer-Optimization (S-O) library | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundaranajan | 2010-07-27 |
| 7754615 | Method and apparatus for detecting endpoint in a dry etching system by monitoring a superimposed DC current | Siddhartha Panda, Richard Wise, Michael Sievers | 2010-07-13 |
| 7744720 | Suppressor of hollow cathode discharge in a shower head fluid distribution system | Lin Xu | 2010-06-29 |
| 7732759 | Multi-plasma neutral beam source and method of operating | Merritt Funk | 2010-06-08 |
| 7718030 | Method and system for controlling radical distribution | Merritt Funk, David V. Horak, Eric J. Strang | 2010-05-18 |
| 7713758 | Method and apparatus for optimizing a gate channel | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundararajan | 2010-05-11 |
| 7709397 | Method and system for etching a high-k dielectric material | Hiromitsu Kambara, Nobuhiro Iwama, Akiteru Ko, Hiromasa Mochiki, Masaaki Hagihara | 2010-05-04 |
| 7674636 | Dynamic temperature backside gas control for improved within-substrate process uniformity | Radha Sundararajan, Merritt Funk | 2010-03-09 |
| 7642193 | Method of treating a mask layer prior to performing an etching process | Peter L. G. Ventzek, Akira Koshiishi, Ikuo Sawada | 2010-01-05 |