Issued Patents All Time
Showing 26–50 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396900 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Barton Lane, Peter L. G. Ventzek, Merritt Funk, Jianping Zhao, Radha Sundararajan | 2016-07-19 |
| 9301383 | Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus | Jianping Zhao, Merritt Funk, Radha Sundararajan | 2016-03-29 |
| 9290848 | Anisotropic etch of copper using passivation | Ying Zhang | 2016-03-22 |
| 9288890 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Merritt Funk, Zhiying Chen | 2016-03-15 |
| 9209032 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Merritt Funk, Zhiying Chen | 2015-12-08 |
| 9151286 | Processing chamber integrated pressure control | Merritt Funk | 2015-10-06 |
| 9111727 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Merritt Funk, Toshihiko Iwao, Peter L. G. Ventzek | 2015-08-18 |
| 9111873 | Low profile magnetic filter | Jianping Zhao, Merritt Funk, Zhiying Chen | 2015-08-18 |
| 9087677 | Methods of electrical signaling in an ion energy analyzer | Merritt Funk, Barton Lane, Jianping Zhao, Radha Sundararajan | 2015-07-21 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Vincent M. Donnelly, Demetre J. Economou, Merritt Funk, Radha Sundararajan | 2015-03-03 |
| 8883024 | Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources | Jianping Zhao | 2014-11-11 |
| 8877080 | Using vacuum ultra-violet (VUV) data in microwave sources | Jianping Zhao | 2014-11-04 |
| 8847159 | Ion energy analyzer | Barton Lane, Merritt Funk, Jianping Zhao, Radha Sundararajan | 2014-09-30 |
| 8816281 | Ion energy analyzer and methods of manufacturing the same | Merritt Funk, Barton Lane, Jianping Zhao, Radha Sundararajan | 2014-08-26 |
| 8808496 | Plasma tuning rods in microwave processing systems | Jianping Zhao, Merritt Funk, Toshihiko Iwao, Peter L. G. Ventzek | 2014-08-19 |
| 8747610 | Plasma source pumping and gas injection baffle | Merritt Funk | 2014-06-10 |
| 8721833 | Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Merritt Funk, Radha Sundararajan | 2014-05-13 |
| 8669705 | Stable surface wave plasma source | Jianping Zhao, Ronald Victor Bravenec, Merritt Funk | 2014-03-11 |
| 8501499 | Adaptive recipe selector | Radha Sundararajan, Merritt Funk, Barton Lane | 2013-08-06 |
| 8486798 | Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof | Zhiying Chen, Jianping Zhao, Merritt Funk, Radha Sundararajan | 2013-07-16 |
| 8460567 | Method and system for etching a MEM device | — | 2013-06-11 |
| 8415884 | Stable surface wave plasma source | Jianping Zhao, Ronald Victor Bravenec, Merritt Funk | 2013-04-09 |
| 8409459 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Kazuki Denpoh, Peter L. G. Ventzek, Lin Xu | 2013-04-02 |
| 8343371 | Apparatus and method for improving photoresist properties using a quasi-neutral beam | Merritt Funk, Radha Sundararajan | 2013-01-01 |
| 8323521 | Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques | Jianping Zhao, Merritt Funk, Toshihisa Nozawa | 2012-12-04 |