Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12384569 | UAV having multifunctional leg assembly and its charging system | Jie Zou | 2025-08-12 |
| 9177843 | Preventing contamination in integrated circuit manufacturing lines | Chien-Ming Sung, Simon Wang, Jia-Ren Chen, Henry Lo, Chen-Hua Yu +1 more | 2015-11-03 |
| 9093447 | Chip on wafer bonder | Chen-Hua Yu, Jui-Pin Hung, Weng-Jin Wu, Wen-Chih Chiou | 2015-07-28 |
| 9037279 | Clustering for prediction models in process control and for optimal dispatching | Francis Ko, Tzu-Yu Wang, Kewei Zuo, Henry Lo, Chih-Wei Lai | 2015-05-19 |
| 8827695 | Wafer's ambiance control | Yi-Li Hsiao, Chen-Hua Yu, Ming-Che Ho, Chien Ling Hwang, Jui-Pin Hung | 2014-09-09 |
| 8795486 | PVD target with end of service life detection capability | Yi-Li Hsiao, Jerry Hwang, Jyh-Cherng Sheu, Lawrance Sheu, Chen-Hua Yu | 2014-08-05 |
| 8682466 | Automatic virtual metrology for semiconductor wafer result prediction | Francis Ko, Chih-Wei Lai, Kewei Zuo, Henry Lo, Ping-Hsu Chen +2 more | 2014-03-25 |
| 8433434 | Near non-adaptive virtual metrology and chamber control | Amy Wang, Chen-Hua Yu, Henry Lo, Francis Ko, Chih-Wei Lai +1 more | 2013-04-30 |
| 8409993 | Method and system for controlling copper chemical mechanical polish uniformity | Francis Ko, Chun-Hsien Lin, Chih-Wei Lai, Ping-Hsu Chen, Henry Lo | 2013-04-02 |
| 8387674 | Chip on wafer bonder | Chen-Hua Yu, Jui-Pin Hung, Weng-Jin Wu, Wen-Chih Chiou | 2013-03-05 |
| 8276648 | PVD target with end of service life detection capability | Yi-Li Hsiao, Chen-Hua Yu, Lawrance Sheu | 2012-10-02 |
| 8172641 | CMP by controlling polish temperature | Ming-Che Ho, Lawrence Chiang Sheu | 2012-05-08 |
| 8145337 | Methodology to enable wafer result prediction of semiconductor wafer batch processing equipment | Chun-Hsien Lin, Amy Wang, Francis Ko | 2012-03-27 |
| 8133097 | Polishing apparatus | Yu-Liang Lin, Chien Ling Hwang, Chen-Hua Yu | 2012-03-13 |
| 8109407 | Apparatus for storing substrates | Yi-Li Hsiao, Chen-Hua Yu, Jui-Pin Hung, Ming-Shih Yeh | 2012-02-07 |
| 8101052 | Adjustable anode assembly for a substrate wet processing apparatus | Yi-Li Hsiao, Chen-Hua Yu, Lawrance Sheu | 2012-01-24 |
| 7974728 | System for extraction of key process parameters from fault detection classification to enable wafer prediction | Chun-Hsien Lin, Francis Ko, Kewei Zuo, Henry Lo | 2011-07-05 |
| 7956448 | Stacked structures and methods of fabricating stacked structures | Chen-Hua Yu, Wen-Chih Chiou, Weng-Jin Wu | 2011-06-07 |
| 7951723 | Integrated etch and supercritical CO2 process and chamber design | Ching-Ya Wang, Weng-Jin Wu, Henry Lo | 2011-05-31 |
| 7891536 | PVD target with end of service life detection capability | Yi-Li Hsiao, Chen-Hua Yu, Lawrance Sheu | 2011-02-22 |
| 7879711 | Stacked structures and methods of fabricating stacked structures | Chen-Hua Yu, Wen-Chih Chiou, Weng-Jin Wu | 2011-02-01 |
| 7851234 | System and method for enhanced control of copper trench sheet resistance uniformity | Francis Ko, Henry Lo, Chi-Chun Hsieh, Amy Wang | 2010-12-14 |
| 7829815 | Adjustable electrodes and coils for plasma density distribution control | Ying Chen, Chi-An Kao, Po-Zen Chen, Yi-Li Hsiao, Chen-Hua Yu +1 more | 2010-11-09 |
| 7767471 | Auto routing for optimal uniformity control | Francis Ko, Henry Lo, Chi-Chun Hsieh, Amy Wang, Chih-Wei Lai +1 more | 2010-08-03 |
| 7758338 | Substrate carrier, port apparatus and facility interface and apparatus including same | Yi-Li Hsiao, Chen-Hua Yu, Fu-Kang Tien, Jui-Pin Hung | 2010-07-20 |