Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10810263 | User interface for accessing hierarchical data | Cheng Yu Yao, Nan Wang | 2020-10-20 |
| 9588505 | Near non-adaptive virtual metrology and chamber control | Tzu-Yu Wang, Chen-Hua Yu, Chien Rhone Wang, Jung Cheng Ko, Chih-Wei Lai +1 more | 2017-03-07 |
| 9177843 | Preventing contamination in integrated circuit manufacturing lines | Chien-Ming Sung, Simon Wang, Jia-Ren Chen, Chen-Hua Yu, Jean Wang +1 more | 2015-11-03 |
| 9037279 | Clustering for prediction models in process control and for optimal dispatching | Francis Ko, Tzu-Yu Wang, Kewei Zuo, Jean Wang, Chih-Wei Lai | 2015-05-19 |
| 8682466 | Automatic virtual metrology for semiconductor wafer result prediction | Francis Ko, Chih-Wei Lai, Kewei Zuo, Jean Wang, Ping-Hsu Chen +2 more | 2014-03-25 |
| 8433434 | Near non-adaptive virtual metrology and chamber control | Amy Wang, Chen-Hua Yu, Jean Wang, Francis Ko, Chih-Wei Lai +1 more | 2013-04-30 |
| 8409993 | Method and system for controlling copper chemical mechanical polish uniformity | Francis Ko, Chun-Hsien Lin, Jean Wang, Chih-Wei Lai, Ping-Hsu Chen | 2013-04-02 |
| 7974728 | System for extraction of key process parameters from fault detection classification to enable wafer prediction | Chun-Hsien Lin, Francis Ko, Kewei Zuo, Jean Wang | 2011-07-05 |
| 7951723 | Integrated etch and supercritical CO2 process and chamber design | Ching-Ya Wang, Weng-Jin Wu, Jean Wang | 2011-05-31 |
| 7928549 | Integrated circuit devices with multi-dimensional pad structures | Hai-Ching Chen, Harold C. H. Hsiung | 2011-04-19 |
| 7851234 | System and method for enhanced control of copper trench sheet resistance uniformity | Francis Ko, Jean Wang, Chi-Chun Hsieh, Amy Wang | 2010-12-14 |
| 7767471 | Auto routing for optimal uniformity control | Jean Wang, Francis Ko, Chi-Chun Hsieh, Amy Wang, Chih-Wei Lai +1 more | 2010-08-03 |
| 7634325 | Prediction of uniformity of a wafer | Jean Wang, Francis Ko, Ping-Hsu Chen, Chih-Wei Lai | 2009-12-15 |
| 7544606 | Method to implement stress free polishing | Jean Wang, Chia-Ming Yang, Joshua Tseng | 2009-06-09 |
| 7387973 | Method for improving low-K dielectrics by supercritical fluid treatments | Ching-Ya Wang, Joshua Tseng | 2008-06-17 |
| 7364161 | Card game | — | 2008-04-29 |
| 7354623 | Surface modification of a porous organic material through the use of a supercritical fluid | Ching-Ya Wang, Ping Chuang, Sunny Wu, Yu-Liang Lin, Hung-Jung Tu +1 more | 2008-04-08 |
| 7338909 | Micro-etching method to replicate alignment marks for semiconductor wafer photolithography | Yu-Liang Lin, Chung-Long Chang, Gorge Huang, Tony Lu, Gnesh Yeh +8 more | 2008-03-04 |
| 7332449 | Method for forming dual damascenes with supercritical fluid treatments | Ching-Ya Wang, Joshua Tseng, Jean Wang | 2008-02-19 |
| 7129151 | Planarizing method employing hydrogenated silicon nitride planarizing stop layer | Ping Chuang, Mei Shang Zhou | 2006-10-31 |
| 7121550 | Card game | — | 2006-10-17 |
| 7083495 | Advanced process control approach for Cu interconnect wiring sheet resistance control | Chun-Hsien Lin, Ai-Sen Liu, Sunny Wu, Yu-Liang Lin, Mei Sheng Zhou | 2006-08-01 |
| 7055822 | Card game | — | 2006-06-06 |
| 7004467 | Card game | — | 2006-02-28 |
| 6987064 | Method and composition to improve a nitride/oxide wet etching selectivity | Ping Chuang, Huxley Lee | 2006-01-17 |