Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354623 | Surface modification of a porous organic material through the use of a supercritical fluid | Ching-Ya Wang, Sunny Wu, Yu-Liang Lin, Hung-Jung Tu, Mei Sheng Zhou +1 more | 2008-04-08 |
| 7129151 | Planarizing method employing hydrogenated silicon nitride planarizing stop layer | Henry Lo, Mei Shang Zhou | 2006-10-31 |
| 6987064 | Method and composition to improve a nitride/oxide wet etching selectivity | Huxley Lee, Henry Lo | 2006-01-17 |
| 6884149 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Henry Lo, Chao-Jung Chang, Ping-Hsu Chen, Yu-Liang Lin +3 more | 2005-04-26 |
| 6875285 | System and method for dampening high pressure impact on porous materials | Ching-Ya Wang, Yu-Liang Lin, Mei Sheng Zhou, Henry Lo | 2005-04-05 |
| 6872127 | Polishing pad conditioning disks for chemical mechanical polisher | Yu-Liang Lin, Henry Lo | 2005-03-29 |
| 6729935 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Henry Lo, Chao-Jung Chang, Ping-Hsu Chen, Yu-Liang Lin +3 more | 2004-05-04 |