Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926584 | Dual mode hybrid control and method for CMP slurry | Ping-Hsu Chen, Chin-Hsin Peng, Jui-Cheng Lo, Chien-Kuo Lu, Chien-Ling Huang | 2005-08-09 |
| 6884149 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Ping Chuang, Henry Lo, Ping-Hsu Chen, Yu-Liang Lin +3 more | 2005-04-26 |
| 6860723 | Slurry flow control and monitor system for chemical mechanical polisher | Ben-Shu Chen, Jui-Cheng Lo, Chin-Hsin Peng, Chien-Kuo Lu | 2005-03-01 |
| 6729935 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Ping Chuang, Henry Lo, Ping-Hsu Chen, Yu-Liang Lin +3 more | 2004-05-04 |