Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7125521 | Method to solve alignment mark blinded issues and technology for application of semiconductor etching at a tiny area | Chung-Long Chang, Shang-Ting Tsai, Yu-Liang Lin | 2006-10-24 |
| 6926584 | Dual mode hybrid control and method for CMP slurry | Chao-Jung Chang, Ping-Hsu Chen, Chin-Hsin Peng, Chien-Kuo Lu, Chien-Ling Huang | 2005-08-09 |
| 6860723 | Slurry flow control and monitor system for chemical mechanical polisher | Ben-Shu Chen, Chao-Jung Chang, Chin-Hsin Peng, Chien-Kuo Lu | 2005-03-01 |
| 5726102 | Method for controlling etch bias in plasma etch patterning of integrated circuit layers | — | 1998-03-10 |
| 5667630 | Low charge-up reactive ion metal etch process | — | 1997-09-16 |