Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7634325 | Prediction of uniformity of a wafer | Francis Ko, Ping-Hsu Chen, Henry Lo, Chih-Wei Lai | 2009-12-15 |
| 7544606 | Method to implement stress free polishing | Chia-Ming Yang, Henry Lo, Joshua Tseng | 2009-06-09 |
| 7332449 | Method for forming dual damascenes with supercritical fluid treatments | Ching-Ya Wang, Joshua Tseng, Henry Lo | 2008-02-19 |