Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795486 | PVD target with end of service life detection capability | Yi-Li Hsiao, Jerry Hwang, Jyh-Cherng Sheu, Jean Wang, Chen-Hua Yu | 2014-08-05 |
| 8276648 | PVD target with end of service life detection capability | Yi-Li Hsiao, Chen-Hua Yu, Jean Wang | 2012-10-02 |
| 8101052 | Adjustable anode assembly for a substrate wet processing apparatus | Yi-Li Hsiao, Chen-Hua Yu, Jean Wang | 2012-01-24 |
| 7891536 | PVD target with end of service life detection capability | Yi-Li Hsiao, Chen-Hua Yu, Jean Wang | 2011-02-22 |
| 7829815 | Adjustable electrodes and coils for plasma density distribution control | Ying Chen, Chi-An Kao, Po-Zen Chen, Yi-Li Hsiao, Chen-Hua Yu +1 more | 2010-11-09 |
| 7642100 | Method and system for yield and productivity improvements in semiconductor processing | Chen-Hua Yu, Yi-Li Hsiao, Francis Ko | 2010-01-05 |