Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8983644 | Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same | Fan-Tien Cheng, Hsien-Cheng Huang, Yung-Cheng Chang | 2015-03-17 |
| 8688256 | Advanced process control system and method utilizing virtual metrology with reliance index | Fan-Tien Cheng, Wei Wu | 2014-04-01 |
| 8207532 | Constant and reducible hole bottom CD in variable post-CMP thickness and after-development-inspection CD | Yung-Chang Chang, Yu-Ping Chang, Ling-Sung Wang | 2012-06-26 |
| 7829815 | Adjustable electrodes and coils for plasma density distribution control | Ying Chen, Po-Zen Chen, Yi-Li Hsiao, Chen-Hua Yu, Jean Wang +1 more | 2010-11-09 |
| 7603328 | Dual-phase virtual metrology method | Fan-Tien Cheng, Hsien-Cheng Huang | 2009-10-13 |