Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11592754 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Jen-Yang Chung | 2023-02-28 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-02-21 |
| 11528798 | Replacement method for droplet generator | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2022-10-11 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2022-05-24 |
| 11212903 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Chun-Lin Chang, Li-Jui Chen | 2021-12-28 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Hsiao-Lun Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Li-Jui Chen +1 more | 2021-08-10 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen | 2021-07-20 |
| 11029613 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Li-Jui Chen, Chia-Chen Chen | 2021-06-08 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-04-13 |
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2020-12-29 |
| 10852191 | Light source system and polarization angle adjusting method | Jen-Hao Yeh, Chun-Lin Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-01 |
| 10795264 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2020-10-06 |
| 10779387 | Extreme ultraviolet photolithography system and method | Ming-Hsun Tsai, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen, Po-Chung Cheng | 2020-09-15 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Li-Jui Chen, Chia-Chen Chen | 2020-07-21 |
| 10670970 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Li-Jui Chen +1 more | 2020-06-02 |
| 10524345 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen +1 more | 2019-12-31 |
| 10509324 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2019-12-17 |
| 10361134 | Method for lithographic process and lithographic system | Wei-Chih Lai, Li-Kai Cheng, Shun-Jung Chen, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2019-07-23 |