Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10342109 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2019-07-02 |
| 10338475 | Light source for lithography exposure process | Hsin-Feng Chen, Li-Jui Chen, Bo-Tsun Liu | 2019-07-02 |
| 10331035 | Light source for lithography exposure process | Cheng-Hao LAI, Li-Jui Chen | 2019-06-25 |
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Bo-Tsun Liu, Li-Jui Chen | 2018-12-25 |