Issued Patents All Time
Showing 151–175 of 312 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7687227 | Resist pattern forming method and manufacturing method of semiconductor device | Eishi Shiobara, Daisuke Kawamura, Yasunobu Onishi | 2010-03-30 |
| 7687279 | Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device | Eishi Shiobara | 2010-03-30 |
| 7683291 | Substrate processing method and manufacturing method of semiconductor device | Kei Hayasaki, Tsuyoshi Shibata, Koutarou Sho | 2010-03-23 |
| 7669608 | Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle | Kei Hayasaki, Tatsuhiko Ema, Riichiro Takahashi | 2010-03-02 |
| 7662546 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Eishi Shiobara, Daisuke Kawamura, Kei Hayasaki | 2010-02-16 |
| 7662543 | Pattern forming method and method of manufacturing semiconductor device | Daisuke Kawamura | 2010-02-16 |
| 7626148 | Touch key and induction heating cooking device employing the same | — | 2009-12-01 |
| 7604832 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2009-10-20 |
| 7579543 | Electronic musical apparatus and lyrics displaying apparatus | Kazuo Haruyama, Takashi Ikeda, Tadahiko Ikeya | 2009-08-25 |
| 7541136 | Mask, manufacturing method for mask, and manufacturing method for semiconductor device | Kyoko Izuha, Hideki Kanai, Soichi Inoue, Shingo Kanamitsu | 2009-06-02 |
| 7534979 | Pressure-contact type rectifier with contact friction reducer | Shigeki Maekawa, Hiroya Ikuta, Shigeharu Nagai, Toshiaki Kashihara, Shinji Iwamoto +1 more | 2009-05-19 |
| 7527918 | Pattern forming method and method for manufacturing a semiconductor device | Takehiro Kondoh, Eishi Shiobara, Tomoyuki Takeishi, Kenji Chiba | 2009-05-05 |
| 7524618 | Resist pattern forming method, semiconductor apparatus using said method, and exposure apparatus thereof | — | 2009-04-28 |
| 7510341 | Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus | Kei Hayasaki, Daizo Mutoh, Masafumi Asano, Tadahito Fujisawa, Tsuyoshi Shibata | 2009-03-31 |
| D585530 | Fluid pressure equipment fitting | — | 2009-01-27 |
| 7483155 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Toru Mikami, Yuichiro Yamazaki, Toshiya Kotani | 2009-01-27 |
| 7477353 | Lithography apparatus, method of forming pattern and method of manufacturing semiconductor device | Tsuyoshi Shibata | 2009-01-13 |
| 7472582 | Leak diagnosis system and leak diagnosis method | Nobuhiro Takano | 2009-01-06 |
| 7465866 | Assistive apparatus and computer-readable medium storing computer program for playing music | Kazuhisa Ueki, Tadahiko Ikeya, Masao Ishibashi, Sachiyo Kubo, Masaki Hara +1 more | 2008-12-16 |
| 7446853 | Exposure method, exposure tool and method of manufacturing a semiconductor device | Kazuya Fukuhara | 2008-11-04 |
| 7428534 | Information retrieval system and information retrieval method using network | Taiki Kamiya, Yasuhiko Asahi, Taro Tokuhiro, Seiichi Yamaguchi, Hisanori Murakami | 2008-09-23 |
| 7423728 | Immersion exposure method and apparatus, and manufacturing method of a semiconductor device | Kentaro Matsunaga, Takuya Kono | 2008-09-09 |
| 7413185 | Paper sheet takeout apparatus | Yusuke Mitsuya | 2008-08-19 |
| 7399578 | Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method | Riichiro Takahashi, Kei Hayasaki, Tomoyuki Takeishi | 2008-07-15 |
| 7371434 | Liquid film forming method and solid film forming method | — | 2008-05-13 |