Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9612108 | Measurement apparatus and measurement method | — | 2017-04-04 |
| 7903264 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Shinichi Ito, Yuichiro Yamazaki, Toshiya Kotani | 2011-03-08 |
| 7573582 | Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system | — | 2009-08-11 |
| 7483155 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Shinichi Ito, Yuichiro Yamazaki, Toshiya Kotani | 2009-01-27 |
| 7348192 | Method for monitoring film thickness, a system for monitoring film thickness, a method for manufacturing a semiconductor device, and a program product for controlling film thickness monitoring system | — | 2008-03-25 |
| 7289232 | Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark | Toru Koike | 2007-10-30 |
| 7164628 | Optical disk device | — | 2007-01-16 |
| 6825938 | Film thickness measuring method and step measuring method | Toshihiko Kikuchi | 2004-11-30 |
| 6563594 | Mark position detecting system and method for detecting mark position | — | 2003-05-13 |
| 5426540 | Digital audio reproducing apparatus | — | 1995-06-20 |