Issued Patents All Time
Showing 201–225 of 312 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960540 | Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium | Katsuya Okumura | 2005-11-01 |
| 6913208 | Liquid atomizer | Makoto Tabata, Kei Asai | 2005-07-05 |
| 6881058 | Apparatus for processing substrate and method of processing the same | Kenji Kawano, Eishi Shiobara, Daisuke Kawamura, Kei Hayasaki | 2005-04-19 |
| 6880131 | Apparatus and method for selecting data sets | Hiroki Nakazono | 2005-04-12 |
| 6842281 | Observation device, ultraviolet microscope and observation method | Atsushi Tsurumune, Jiro Mizuno, Riichiro Takahashi, Tatsuhiko Ema | 2005-01-11 |
| 6831258 | Heating device, method for evaluating heating device and pattern forming method | Kei Hayasaki, Kenji Kawano | 2004-12-14 |
| 6818387 | Method of forming a pattern | Riichiro Takahashi, Kei Hayasaki | 2004-11-16 |
| 6816833 | Audio signal processor with pitch and effect control | Kazuhide Iwamoto | 2004-11-09 |
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6762355 | Electronic musical instrument | Takeshi Komano | 2004-07-13 |
| 6742944 | ALKALINE SOLUTION AND MANUFACTURING METHOD, AND ALKALINE SOLUTION APPLIED TO PATTERN FORMING METHOD, RESIST FILM REMOVING METHOD, SOLUTION APPLICATION METHOD, SUBSTRATE TREATMENT METHOD, SOLUTION SUPPLY METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | Riichiro Takahashi, Kei Hayasaki, Tomoyuki Takeishi | 2004-06-01 |
| 6730447 | Manufacturing system in electronic devices | Tatsuhiko Higashiki, Hiroshi Ikegami, Nobuo Hayasaka | 2004-05-04 |
| 6719844 | Deposition method, deposition apparatus, and pressure-reduction drying apparatus | Tatsuhiko Ema | 2004-04-13 |
| 6709699 | Film-forming method, film-forming apparatus and liquid film drying apparatus | Tatsuhiko Ema, Katsuya Okumura | 2004-03-23 |
| 6709531 | Chemical liquid processing apparatus for processing a substrate and the method thereof | Riichiro Takahashi, Tatsuhiko Ema, Katsuya Okamura | 2004-03-23 |
| 6686130 | Pattern forming method using photolithography | Kei Hayasaki | 2004-02-03 |
| 6680462 | Heat treating method and heat treating apparatus | Hideaki Sakurai, Iwao Higashikawa, Akitoshi Kumagae | 2004-01-20 |
| 6669982 | Method for forming a liquid film on a substrate | — | 2003-12-30 |
| 6660091 | Apparatus for forming liquid film | Katsuya Okumura | 2003-12-09 |
| 6621250 | Battery capacity measuring and remaining capacity calculating system | Naohiko Ohkubo, Shinji Kishida, Toshiyuki Kawai, Katsuhide Kikuchi, Tetsuro Kikuchi | 2003-09-16 |
| 6603101 | Heating device, method for evaluating heating device and pattern forming method | Kei Hayasaki, Kenji Kawano | 2003-08-05 |
| 6579382 | Chemical liquid processing apparatus for processing a substrate and the method thereof | — | 2003-06-17 |
| 6550990 | Substrate processing apparatus and processing method by use of the apparatus | Hideaki Sakurai, Masamitsu Itoh | 2003-04-22 |
| 6528128 | Method of treating a substrate | Katsuya Okumura | 2003-03-04 |
| 6506453 | Deposition method, deposition apparatus, and pressure-reduction drying apparatus | Tatsuhiko Ema | 2003-01-14 |