Issued Patents All Time
Showing 1–25 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964513 | Plasma processing apparatus | Shintarou Nakatani | 2021-03-30 |
| 8282848 | Plasma processing method and plasma processing apparatus | Yutaka Ohmoto, Mamoru Yakushiji, Yutaka Kouzuma, Ken Yoshioka | 2012-10-09 |
| 8093529 | Control method of a temperature of a sample | Naoyuki Kofuji | 2012-01-10 |
| 8092637 | Manufacturing method in plasma processing apparatus | Yutaka Kouzuma, Yutaka Ohmoto, Mamoru Yakushiji, Ken Yoshioka | 2012-01-10 |
| 7947189 | Vacuum processing apparatus and vacuum processing method of sample | Tooru Aramaki, Tadamitsu Kanekiyo, Shigeru Shirayone, Hideki Kihara | 2011-05-24 |
| 7567422 | Plasma processing apparatus and plasma processing method | Hiroyuki Kitsunai, Seiichiro Kanno | 2009-07-28 |
| 7367135 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2008-05-06 |
| D557226 | Electrode cover for a plasma processing apparatus | Takeo Uchino, Hiroyuki Shichida, Masakazu Isozaki, Akitaka Makino | 2007-12-11 |
| 7303998 | Plasma processing method | Tooru Aramaki, Ryujiro Udo, Motohiko Yoshigai, Takashi Fujii | 2007-12-04 |
| 7296783 | Vacuum processing apparatus | Hideki Kihara, Nobuo Nagayasu | 2007-11-20 |
| RE39823 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2007-09-11 |
| RE39776 | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2007-08-21 |
| RE39756 | Vacuum processing operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2007-08-07 |
| 7089680 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2006-08-15 |
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-11-29 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-06-14 |
| 6899789 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2005-05-31 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-05-03 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2005-04-19 |
| 6846363 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2005-01-25 |
| 6833051 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka +4 more | 2004-12-21 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai +3 more | 2004-06-29 |
| 6676805 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Kazue Takahashi, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida | 2004-01-13 |
| 6662465 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-12-16 |
| 6655044 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Atsushi Itou | 2003-12-02 |