Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Gautam Pisharody, Seshadri Ramaswami, Niranjan Kumar | 2020-12-29 |
| 10589423 | Robot vision super visor for hybrid homing, positioning and workspace UFO detection enabling industrial robot use for consumer applications | — | 2020-03-17 |
| 10468285 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2019-11-05 |
| 10271686 | Kitchen in a box cooking appliance with selectably engaged independent stirring and heating control for a plurality of cooking stations | — | 2019-04-30 |
| 9818585 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Puneet Bajaj, David H. Loo | 2017-11-14 |
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |
| 9643324 | Multi-axis robot with remote drives facilitating hazardous energy isolation for use by home consumers | Xiaoyi Huang | 2017-05-09 |
| 9484202 | Apparatus and methods for spacer deposition and selective removal in an advanced patterning process | Jie Zhou, Chentsau Ying, Srinivas D. Nemani, Jingjing Liu, Ellie Yieh | 2016-11-01 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |
| 9382625 | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition | Jun Xue, Jingjing Liu, Yongmei Chen, Ludovic Godet, Chentsau Ying | 2016-07-05 |
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Vincent E. Burkhart, Scott Fields | 2016-05-10 |
| 9131807 | Robotic kitchen top cooking apparatus and method for preparation of dishes using computer recipies | Riya Bhattacharya | 2015-09-15 |
| 9064911 | Heated cooling plate for E-chucks and pedestals | Matt Cheng-Hsiung Tsai | 2015-06-23 |
| 8900471 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Puneet Bajaj, David H. Loo | 2014-12-02 |
| 8559159 | Electrostatic chuck and methods of use thereof | Martin Lee Riker, Keith A. Miller, Vijay D. Parkhe, Steven V. Sansoni | 2013-10-15 |
| 8390980 | Electrostatic chuck assembly | Steven V. Sansoni, Cheng-Hsiung Tsai, Karl M. Brown, Vijay D. Parkhe, Hari Ponnekanti | 2013-03-05 |
| 7337691 | Parallel kinematics mechanism with a concentric spherical joint | Michael Merz | 2008-03-04 |
| 7331750 | Parallel robot | Michael Merz | 2008-02-19 |
| 7304264 | Micro thermal chamber having proximity control temperature management for devices under test | — | 2007-12-04 |
| 6740998 | Single motor, multi-axis stage | — | 2004-05-25 |
| 6648583 | Parallel kinematics mechanism with a concentric spherical joint | Michael Merz | 2003-11-18 |
| 6602042 | Parallel kinematics mechanism with a concentric spherical joint | Michael Merz | 2003-08-05 |
| 6497548 | Parallel kinematics mechanism with a concentric sperical joint | Michael Merz | 2002-12-24 |