| 8149379 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Lucas Henricus Johannes Stevens, Michel Riepen |
2012-04-03 |
| 7924399 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Tjarko Adriaan Rudolf Van Empel, Herman Vogel, Niek Jacobus Johannes Roset |
2011-04-12 |
| 7728951 |
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus |
Tjarko Adriaan Rudolf Van Empel, Niek Jacobus Johannes Roset |
2010-06-01 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +3 more |
2009-07-14 |
| 7432513 |
Gas shower, lithographic apparatus and use of a gas shower |
Tjarko Adriaan Rudolf Van Empel, Niek Jacobus Johannes Roset |
2008-10-07 |
| 7253875 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Engelbertus Antonius Fransiscus Van Der Pasch, Niek Jacobus Johannes Roset |
2007-08-07 |
| 7227612 |
Lithographic apparatus and device manufacturing method |
Antonius Johannes Van Der Net, Tjarko Adriaan Rudolf Van Empel |
2007-06-05 |
| 7136142 |
Lithographic apparatus having a gas flushing device |
Marcel Beckers, Ronald Johannes Hultermans, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars +2 more |
2006-11-14 |
| 7057702 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Johannes Catharinus Hubertus Mulkens, Jeroen Johannes Sophia Maria Mertens, Antonius Johannes Van Der Net, Nicolas Lallemant +1 more |
2006-06-06 |