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Optical device with two cylindrically symmetric mirrors |
— |
2015-04-28 |
| 7011574 |
Polyelectrolyte dispensing polishing pad |
Alexander William Simpson |
2006-03-14 |
| 6841480 |
Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate |
Alexander William Simpson |
2005-01-11 |
| 6420267 |
Method for forming an integrated barrier/plug for a stacked capacitor |
Chenting Lin, Andreas Knorr, Keith Kwong Hon Wong, Hua Shen, Jenny Lian |
2002-07-16 |
| 6358850 |
Slurry-less chemical-mechanical polishing of oxide materials |
Laertis Economikos, Sumit Pandey, Ravikumar Ramachandran |
2002-03-19 |
| 6303506 |
Compositions for and method of reducing/eliminating scratches and defects in silicon dioxide during CMP process |
Haruki Nojo, Ravikumar Ramachandran |
2001-10-16 |
| 6136714 |
Methods for enhancing the metal removal rate during the chemical-mechanical polishing process of a semiconductor |
— |
2000-10-24 |
| 6037648 |
Semiconductor structure including a conductive fuse and process for fabrication thereof |
Kenneth C. Arndt, Jeffrey P. Gambino, Jack A. Mandelman, Chandrasekhar Narayan, Rainer Florian Schnabel +1 more |
2000-03-14 |
| 5693561 |
Method of integrated circuit fabrication including a step of depositing tungsten |
Sailesh Mansinh Merchant, Leonard J. Olmer |
1997-12-02 |
| 5243221 |
Aluminum metallization doped with iron and copper to prevent electromigration |
Vivian W. Ryan |
1993-09-07 |
| 5166091 |
Fabrication method in vertical integration |
Nadia Lifshitz |
1992-11-24 |
| 5149672 |
Process for fabricating integrated circuits having shallow junctions |
Nadia Lifshitz |
1992-09-22 |
| 5057441 |
Method for reliability testing integrated circuit metal films |
Gregory M. Gutt, Avid Kamgar, Robert V. Knoell |
1991-10-15 |
| 5008217 |
Process for fabricating integrated circuits having shallow junctions |
Christopher J. Case, Kin P. Cheung, Ruichen Liu, Richard S. Wagner, II |
1991-04-16 |
| 4988405 |
Fabrication of devices utilizing a wet etchback procedure |
Edward P. Martin, Jr., Gerald Smolinsky |
1991-01-29 |
| 4975389 |
Aluminum metallization for semiconductor devices |
Vivian W. Ryan |
1990-12-04 |
| 4871420 |
Selective etching process |
Frank B. Alexander, Jr., Pang Dow Foo |
1989-10-03 |
| 4784719 |
Dry etching procedure |
— |
1988-11-15 |
| 4680084 |
Interferometric methods and apparatus for device fabrication |
Peter Heimann, Joseph M. Moran |
1987-07-14 |
