Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12275832 | Fluorine-containing elastomer composition and method for making cured fluorine-containing elastomer composition | Chung-Ming Huang, Chen-Hsiang Lu, Tien-Chih Cheng | 2025-04-15 |
| 12049697 | Multilayer ALD coating for critical components in process chamber | Chen-Hsiang Lu, Chiun-Da Shiue, Chih-Kai Hu | 2024-07-30 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |
| 11731907 | Ceramic material with high thermal shock resistance and high erosion resistance | Jennifer Y. Sun | 2023-08-22 |
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2022-06-28 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2022-04-12 |
| 11279661 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Dmitry Lubomirsky | 2022-03-22 |
| 11270870 | Processing equipment component plating | Juan Carlos Rocha-Alvarez, Bushra Afzal | 2022-03-08 |
| 11264261 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Senh Thach | 2022-03-01 |
| 11047043 | Chamber liner for high temperature processing | Sanjeev Baluja, Kalyanjit Ghosh | 2021-06-29 |
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-24 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-11-17 |
| 10711350 | Alumina layer formation on aluminum surface to protect aluminum parts | Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2020-07-14 |
| 10622194 | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2020-04-14 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Kalyanjit Ghosh, Mayur Govind Kulkarni, Gregory Siu, Praket P. Jha +4 more | 2020-04-07 |
| 10480068 | Chamber liner for high temperature processing | Sanjeev Baluja, Kalyanjit Ghosh | 2019-11-19 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10364197 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Dmitry Lubomirsky | 2019-07-30 |
| 10336656 | Ceramic article with reduced surface defect density | Thorsten Lill, Jennifer Y. Sun, Benjamin Schwarz | 2019-07-02 |
| 10266943 | Plasma corrosion resistive heater for high temperature processing | Abdul Aziz Khaja, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2019-04-23 |
| 10242888 | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2019-03-26 |
| 10157731 | Semiconductor processing apparatus with protective coating including amorphous phase | Jennifer Y. Sun, Kenneth S. Collins | 2018-12-18 |
| 9975320 | Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater | Juan Carlos Rocha-Alvarez, Jianhua Zhou | 2018-05-22 |
| 9896376 | Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent | Jennifer Y. Sun, Kenneth S. Collins | 2018-02-20 |