| 11733035 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson |
2023-08-22 |
| 11029148 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson |
2021-06-08 |
| 10648802 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson |
2020-05-12 |
| 10082390 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson |
2018-09-25 |
| 7638440 |
Method of depositing an amorphous carbon film for etch hardmask application |
Yuxiang Wang, Sudha Rathi, Hichem M'Saad |
2009-12-29 |
| 7407893 |
Liquid precursors for the CVD deposition of amorphous carbon films |
Martin Jay Seamons, Wendy H. Yeh, Sudha Rathi, Deenesh Padhi, Andy Luan +6 more |
2008-08-05 |
| 7253123 |
Method for producing gate stack sidewall spacers |
Reza Arghavani, Li-Qun Xia, Kang Sub Yim |
2007-08-07 |
| 7064077 |
Method for high aspect ratio HDP CVD gapfill |
Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Bruno Geoffrion +1 more |
2006-06-20 |
| 7052552 |
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD |
Eric Liu |
2006-05-30 |
| 6812153 |
Method for high aspect ratio HDP CVD gapfill |
Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Bruno Geoffrion +1 more |
2004-11-02 |
| 6715496 |
Method and apparatus for cleaning a semiconductor wafer processing system |
Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan |
2004-04-06 |
| 6596123 |
Method and apparatus for cleaning a semiconductor wafer processing system |
Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan |
2003-07-22 |
| 6335288 |
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD |
Eric Liu |
2002-01-01 |
| 6045877 |
Pyrolytic chemical vapor deposition of silicone films |
Karen K. Gleason |
2000-04-04 |
