Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013355 | Methods and systems for compact, small spot size soft x-ray scatterometry | David Y. Wang, Kerstin Purrucker | 2024-06-18 |
| 11557462 | Collecting and recycling rare gases in semiconductor processing equipment | Chao Chang | 2023-01-17 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev | 2022-05-17 |
| 11268901 | Variable aperture mask | Barry Blasenheim, Noam Sapiens, Pablo I. Rovira | 2022-03-08 |
| 11272607 | Laser produced plasma illuminator with low atomic number cryogenic target | Chao Chang, Jongjin Kim, Will Schumaker, Ben Clarke | 2022-03-08 |
| 11259394 | Laser produced plasma illuminator with liquid sheet jet target | Chao Chang, Will Schumaker, Jongjin Kim | 2022-02-22 |
| 11121521 | System and method for pumping laser sustained plasma with interlaced pulsed illumination sources | Ilya Bezel, Matthew Derstine, William Alexander Schumaker | 2021-09-14 |
| 10859518 | X-ray zoom lens for small angle x-ray scatterometry | Nikolay Artemiev | 2020-12-08 |
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Esen Salcin, Derrick Shaughnessy, Andrei V. Shchegrov, Jonathan M. Madsen +1 more | 2020-10-13 |
| 10663392 | Variable aperture mask | Barry Blasenheim, Noam Sapiens, Pablo I. Rovira | 2020-05-26 |
| 10599712 | Shared image database with geographic navigation | — | 2020-03-24 |
| 10451412 | Apparatus and methods for detecting overlay errors using scatterometry | Michael Adel, Walter D. Mieher, Ibrahim Abdulhalim, Ady Levy | 2019-10-22 |
| 10365211 | Systems and methods for metrology beam stabilization | Barry Blasenheim, Noam Sapiens | 2019-07-30 |
| 10235390 | Shared image database with geographic navigation | — | 2019-03-19 |
| 10151584 | Periodic patterns and technique to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2018-12-11 |
| 9835447 | Periodic patterns and technique to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2017-12-05 |
| 9552426 | Shared image database with geographic navigation | — | 2017-01-24 |
| 9476698 | Periodic patterns and technique to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2016-10-25 |
| 9234745 | Periodic patterns and techniques to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2016-01-12 |
| 9104696 | Shared image database with geographic navigation | — | 2015-08-11 |
| 9103662 | Periodic patterns and technique to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2015-08-11 |
| 8793248 | Method and system for recommending Geo-tagged items | David Ben-Shimon, Lior Rokach | 2014-07-29 |
| 8570515 | Periodic patterns and technique to control misalignment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2013-10-29 |
| 8525994 | Periodic patterns and technique to control misaligment between two layers | Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman | 2013-09-03 |
| 8472981 | Shared image database with geographic navigation | — | 2013-06-25 |