| 12013355 |
Methods and systems for compact, small spot size soft x-ray scatterometry |
David Y. Wang, Kerstin Purrucker |
2024-06-18 |
$237,465,000 |
| 11557462 |
Collecting and recycling rare gases in semiconductor processing equipment |
Chao Chang |
2023-01-17 |
$106,015,000 |
| 11333621 |
Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction |
Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev |
2022-05-17 |
|
| 11268901 |
Variable aperture mask |
Barry Blasenheim, Noam Sapiens, Pablo I. Rovira |
2022-03-08 |
$195,055,000 |
| 11272607 |
Laser produced plasma illuminator with low atomic number cryogenic target |
Chao Chang, Jongjin Kim, Will Schumaker, Ben Clarke |
2022-03-08 |
$195,055,000 |
| 11259394 |
Laser produced plasma illuminator with liquid sheet jet target |
Chao Chang, Will Schumaker, Jongjin Kim |
2022-02-22 |
$110,456,000 |
| 11121521 |
System and method for pumping laser sustained plasma with interlaced pulsed illumination sources |
Ilya Bezel, Matthew Derstine, William Alexander Schumaker |
2021-09-14 |
$65,482,000 |
| 10859518 |
X-ray zoom lens for small angle x-ray scatterometry |
Nikolay Artemiev |
2020-12-08 |
|
| 10804167 |
Methods and systems for co-located metrology |
David Y. Wang, Esen Salcin, Derrick Shaughnessy, Andrei V. Shchegrov, Jonathan M. Madsen +1 more |
2020-10-13 |
|
| 10663392 |
Variable aperture mask |
Barry Blasenheim, Noam Sapiens, Pablo I. Rovira |
2020-05-26 |
$234,940,000 |
| 10599712 |
Shared image database with geographic navigation |
— |
2020-03-24 |
$5,550,000 |
| 10451412 |
Apparatus and methods for detecting overlay errors using scatterometry |
Michael Adel, Walter D. Mieher, Ibrahim Abdulhalim, Ady Levy |
2019-10-22 |
|
| 10365211 |
Systems and methods for metrology beam stabilization |
Barry Blasenheim, Noam Sapiens |
2019-07-30 |
|
| 10235390 |
Shared image database with geographic navigation |
— |
2019-03-19 |
$9,476,000 |
| 10151584 |
Periodic patterns and technique to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2018-12-11 |
|
| 9835447 |
Periodic patterns and technique to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2017-12-05 |
|
| 9552426 |
Shared image database with geographic navigation |
— |
2017-01-24 |
$1,256,000 |
| 9476698 |
Periodic patterns and technique to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2016-10-25 |
|
| 9234745 |
Periodic patterns and techniques to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2016-01-12 |
|
| 9104696 |
Shared image database with geographic navigation |
— |
2015-08-11 |
$2,830,000 |
| 9103662 |
Periodic patterns and technique to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2015-08-11 |
$13,091,000 |
| 8793248 |
Method and system for recommending Geo-tagged items |
David Ben-Shimon, Lior Rokach |
2014-07-29 |
|
| 8570515 |
Periodic patterns and technique to control misalignment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2013-10-29 |
$28,111,000 |
| 8525994 |
Periodic patterns and technique to control misaligment between two layers |
Ibrahim Abdulhalim, Mike Adel, Michael Faeyrman |
2013-09-03 |
$53,339,000 |
| 8472981 |
Shared image database with geographic navigation |
— |
2013-06-25 |
$3,707,000 |
