Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354829 | Overlay measurement system and overlay measurement device for overlay error measurement using electron microscopy | Masaki SUGIE | 2025-07-08 |
| 12347074 | Pattern measurement system, pattern measurement method, and program for measuring edge roughness at the edge of a pattern based on a random noise component | Toshimasa Kameda, Junichi Kakuta | 2025-07-01 |
| 12198327 | Measurement system, method for generating learning model to be used when performing image measurement of semiconductor including predetermined structure, and recording medium for storing program for causing computer to execute processing for generating learning model to be used when performing image measurement of semiconductor including predetermined structure | Ryou YUMIBA, Satoru Yamaguchi | 2025-01-14 |
| 11791130 | Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device | Koichi Hamada, Megumi Kimura, Momoyo Enyama, Ryou YUMIBA, Makoto Sakakibara +4 more | 2023-10-17 |
| 11670481 | Charged particle beam device | Motonobu Hommi, Satoru Yamaguchi, Hiroshi Nishihama | 2023-06-06 |
| 11626266 | Charged particle beam device | Keiichiro Hitomi, Kenji Tanimoto, Yusuke Abe, Takuma Yamamoto, Satoru Yamaguchi +2 more | 2023-04-11 |
| 11177112 | Pattern measurement device and non-transitory computer readable medium having stored therein program for executing measurement | Satoru Yamaguchi, Makoto Suzuki, Ryota Watanabe | 2021-11-16 |
| 11170969 | Electron beam observation device, electron beam observation system, and control method of electron beam observation device | Koichi Hamada, Megumi Kimura, Momoyo Enyama, Ryou YUMIBA, Makoto Sakakibara +2 more | 2021-11-09 |
| 11011346 | Electron beam device and image processing method | Koichi Hamada, Satoru Yamaguchi | 2021-05-18 |
| 10984980 | Charged particle beam device for imaging vias inside trenches | Satoru Yamaguchi, Hideki ITAI, Yasunori Takasugi, Kumiko Shimizu | 2021-04-20 |
| 10976536 | Image-forming device, and dimension measurement device | Yasunori Takasugi, Satoru Yamaguchi, Kazuyuki Hirao | 2021-04-13 |
| 10665420 | Charged particle beam apparatus | Yasunori Takasugi, Satoru Yamaguchi, Hideki ITAI, Yoshinori Momonoi, Toshimasa Kameda +1 more | 2020-05-26 |
| 10620421 | Image-forming device, and dimension measurement device | Yasunori Takasugi, Satoru Yamaguchi, Kazuyuki Hirao | 2020-04-14 |
| 10545017 | Overlay error measuring device and computer program for causing computer to measure pattern | Satoru Yamaguchi, Osamu Inoue, Kazuyuki Hirao, Osamu Komuro | 2020-01-28 |
| 10417756 | Pattern measurement apparatus and defect inspection apparatus | Satoru Yamaguchi, Kazuyuki Hirao, Yasunori Takasugi | 2019-09-17 |
| 10197783 | Image-forming device, and dimension measurement device | Yasunori Takasugi, Satoru Yamaguchi, Kazuyuki Hirao | 2019-02-05 |
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Miki Isawa, Satoshi Takada, Kazuhisa Hasumi +1 more | 2017-11-28 |
| 9799903 | Electrocatalyst for solid polymer fuel cell | Hiroshi Iden, Atsushi Ohma, Kazuyuki Satou, Yoshitaka Ono, Hiroyuki Tanaka +1 more | 2017-10-24 |
| 9589343 | Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program | Miki Isawa, Norio Hasegawa | 2017-03-07 |
| 9336587 | Semiconductor circuit pattern measuring apparatus and method | Takuma Shibahara, Michio Oikawa, Satoru Yamaguchi | 2016-05-10 |
| 9129775 | Specimen potential measuring method, and charged particle beam device | Tatsuaki Ishijima, Osamu Nasu, Muneyuki Fukuda, Takeyoshi Ohashi, Hiromasa Yamanashi +1 more | 2015-09-08 |
| 9029045 | Gas diffusion electrode and production method for same; membrane electrode assembly and production method for same | Kazuyuki Satou, Atsushi Ohma, Yoshitaka Ono, Hiroshi Iden | 2015-05-12 |
| 9024272 | Pattern measuring apparatus | Yafeng Zhang, Norio Hasegawa | 2015-05-05 |
| 8478078 | Pattern-searching condition determining method, and pattern-searching condition setting device | Fumihiro Sasajima | 2013-07-02 |
| 7747378 | Method and device for integrative control of gas engine | Masataka Shiraishi, Yoshitaka Kakuhama, Yosuke Kitamura | 2010-06-29 |