MS

Masaki SUGIE

HH Hitachi High-Technologies: 1 patents #674 of 1,200Top 60%
Overall (All Time): #2,433,982 of 4,157,543Top 60%
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Patent #TitleCo-InventorsDate
12354829 Overlay measurement system and overlay measurement device for overlay error measurement using electron microscopy Kei Sakai 2025-07-08