ES

Eugene Shifrin

KL Kla-Tencor: 25 patents #43 of 1,394Top 4%
KL Kla: 4 patents #87 of 758Top 15%
Overall (All Time): #130,304 of 4,157,543Top 4%
29
Patents All Time

Issued Patents All Time

Showing 25 most recent of 29 patents

Patent #TitleCo-InventorsDate
11778720 High efficiency laser-sustained plasma light source with collection of broadband radiation Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin 2023-10-03
11328411 Print check repeater defect detection Hong Chen, Kenong Wu, Xiaochun Li, James A. Smith, Qing Luo +7 more 2022-05-10
11204332 Repeater defect detection Bjorn Brauer, Sumit Sen, Ashok Mathew, Sreeram Chandrasekaran, Lisheng Gao 2021-12-21
11139216 System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer David Craig Oram, Abhinav Mathur, Kenong Wu 2021-10-05
11138722 Differential imaging for single-path optical wafer inspection Anatoly Shchemelinin, Ilya Bezel 2021-10-05
10976025 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2021-04-13
10887974 High efficiency laser-sustained plasma light source Matthew Derstine, Ilya Bezel, Anatoly Shchemelinin 2021-01-05
10714307 Neutral atom imaging system Ilya Bezel, Gildardo Delgado, Rudy F. Garcia 2020-07-14
10714327 System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine 2020-07-14
10679909 System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer David Craig Oram, Abhinav Mathur, Kenong Wu 2020-06-09
10648925 Repeater defect detection Bjorn Brauer, Sumit Sen, Ashok Mathew, Sreeram Chandrasekaran, Lisheng Gao 2020-05-12
10520741 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer 2019-12-31
10395358 High sensitivity repeater defect detection Bjorn Brauer, Ashok Mathew, Chetana Bhaskar, Lisheng Gao, Santosh Bhattacharyya +2 more 2019-08-27
10381216 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer 2019-08-13
10217625 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer 2019-02-26
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2018-03-27
9766187 Repeater detection Hong Chen, Kenong Wu, Masatoshi Yamaoka, Gangadharan Sivaraman, Raghav Babulnath +2 more 2017-09-19
9766186 Array mode repeater detection Hong Chen, Kenong Wu, Masatoshi Yamaoka 2017-09-19
9734422 System and method for enhanced defect detection with a digital matched filter Pavel Kolchin 2017-08-15
9727047 Defect detection using structural information Qing Luo, Kenong Wu, Hucheng Lee, Lisheng Gao, Yan Xiong +1 more 2017-08-08
9709811 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Ilya Bezel, Matthew Panzer 2017-07-18
9355208 Detecting defects on a wafer Ashok Kulkarni, Kris Bhaskar, Graham Michael Lynch, John R. Jordan, Chwen-Jiann Fang 2016-05-31
9262821 Inspection recipe setup from reference image variation Chetana Bhaskar, Ashok Kulkarni, Chien-Huei Chen, Kris Bhaskar, Brian Duffy 2016-02-16
9171364 Wafer inspection using free-form care areas Kenong Wu, Tao Luo, Lisheng Gao, Aravindh Balaji 2015-10-27
9053390 Automated inspection scenario generation Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei Chen, Jason Kirkwood +3 more 2015-06-09