| 11143968 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2021-10-12 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2020-05-12 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2016-10-11 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2015-05-19 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +9 more |
2014-08-05 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more |
2014-05-20 |
| 8638417 |
Fluid handling structure, lithographic apparatus and a device manufacturing method |
Daniel Jozef Maria Direcks, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Marcus Johannes Van Der Zanden +1 more |
2014-01-28 |
| 8508712 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Clemens Johannes Gerardus Van Den Dungen, Koen Steffens, Tijmen Wilfred Mathijs Gunther, David Bessems |
2013-08-13 |
| 8421993 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens, Koen Steffens +1 more |
2013-04-16 |
| 8405815 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Maikel Adrianus Cornelis Schepers, Paul Petrus Joannes Berkvens |
2013-03-26 |
| 8351018 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Clemens Johannes Gerardus Van Den Dungen, Koen Steffens, Arnold Jan Van Putten |
2013-01-08 |
| 8345218 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
Michel Riepen, Nicolaas Rudolf Kemper, Johannes Petrus Martinus Bernardus Vermeulen, Daniel Jozef Maria Direcks, Arnold Jan Van Putten |
2013-01-01 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +5 more |
2012-09-04 |
| 7014457 |
Mould assembly provided with centering means |
Arie Gerrit Izaak Van Der Velde |
2006-03-21 |