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Systems and methods for metrology optimization based on metrology landscapes |
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Track filler and methods for installing the track filler |
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Method and system for providing a quality metric for improved process control |
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Scaling metric for quantifying metrology sensitivity to process variation |
Tal Marciano, Noa Armon |
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Per-site residuals analysis for accurate metrology measurements |
Lilach Saltoun, Tal Marciano |
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Determining the impacts of stochastic behavior on overlay metrology data |
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Method and system for process control with flexible sampling |
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Analyzing root causes of process variation in scatterometry metrology |
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Selection and use of representative target subsets |
Sven Jug |
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Method for estimating and correcting misregistration target inaccuracy |
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Method and system for providing process tool correctables |
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2015-06-09 |