Issued Patents All Time
Showing 25 most recent of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341032 | Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2025-06-24 |
| 12272531 | Dual pressure oxidation method for forming an oxide layer in a feature | Rene George, Tsung-Han Yang, David Knapp, Lara Hawrylchak | 2025-04-08 |
| 12261039 | Method of linearized film oxidation growth | Tobin Kaufman-Osborn | 2025-03-25 |
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Rene George, Eric Kihara Shono, Lara Hawrylchak, Erika HANSEN +3 more | 2024-11-12 |
| 12086709 | Machine-learning based system for virtual flow metering | Douglas Hakkarinen, Christopher Zaremba, Everett D. Robinson, Morgan Cowee, R. James Provost | 2024-09-10 |
| 11996305 | Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover, Naman Apurva +1 more | 2024-05-28 |
| D1023987 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2024-04-23 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2024-04-16 |
| 11948791 | Steam oxidation initiation for high aspect ratio conformal radical oxidation | Taewan Kim | 2024-04-02 |
| 11761080 | Method for processing a substrate by oscillating a boundary layer of the flow of one or more process gases over a surface of a substrate and systems for processing a substrate using the method | Tsung-Han Yang | 2023-09-19 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more | 2023-08-22 |
| 11615944 | Remote plasma oxidation chamber | Eric Kihara Shono, Lara Hawrylchak, Agus Sofian Tjandra, Chaitanya A. PRASAD, Sairaju Tallavarjula | 2023-03-28 |
| 11610776 | Method of linearized film oxidation growth | Tobin Kaufman-Osborn | 2023-03-21 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2023-02-14 |
| 11569245 | Growth of thin oxide layer with amorphous silicon and oxidation | — | 2023-01-31 |
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2022-11-15 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2022-11-01 |
| 11322347 | Conformal oxidation processes for 3D NAND | Johanes F. Swenberg, Taewan Kim, Erika HANSEN | 2022-05-03 |
| 11189485 | Steam oxidation initiation for high aspect ratio conformal radical oxidation | Taewan Kim | 2021-11-30 |
| 11087979 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2021-08-10 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2021-08-03 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Sairaju Tallavarjula +4 more | 2021-08-03 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |