Issued Patents All Time
Showing 25 most recent of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410523 | Integrated low k recovery and ALD metal deposition process for advanced technology node | Shinjae Kwon, Xinyi Lu, Fredrick J. Kim, Bo Xie, Li-Qun Xia +1 more | 2025-09-09 |
| 12387927 | Deposition of boron films | Yung-Chen Lin, Ho-yung David Hwang | 2025-08-12 |
| 12327764 | Two-dimension self-aligned scheme with subtractive metal etch | Yung-Chen Lin, Ho-yung David Hwang | 2025-06-10 |
| 12272564 | Tin oxide and tin carbide materials for semiconductor patterning applications | Yung-Chen Lin, Ho-yung David Hwang | 2025-04-08 |
| 12020908 | Atomic layer etching of Ru metal | Yung-Chen Lin, Ho-yung David Hwang | 2024-06-25 |
| 11508617 | Method of forming interconnect for semiconductor device | Hao Jiang, Chi-Pin Lu, He Ren, Ho-yung David Hwang, Mehul Naik | 2022-11-22 |
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Daniel Lee Diehl, Michael Stolfi, Jothilingam Ramalingam +3 more | 2022-11-08 |
| 11437238 | Patterning scheme to improve EUV resist and hard mask selectivity | Nancy Fung, Ho-yung David Hwang | 2022-09-06 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Eswaranand Venkatasubramanian, Pramit Manna, Chi-Pin Lu, Nancy Fung +1 more | 2021-03-23 |
| 10867795 | Method of etching hardmasks containing high hardness materials | Nancy Fung, Gene S. Lee, Hailong Zhou, Zohreh Hesabi, Akhil Mehrotra +3 more | 2020-12-15 |
| 9245744 | Combinatorial plasma enhanced deposition and etch techniques | Sunil Shanker, Tony P. Chiang | 2016-01-26 |
| 9245848 | Methods for coating a substrate with an amphiphilic compound | Anh Duong, Tony P. Chiang, Zachary Fresco, Nitin Kumar, Jinhong Tong +1 more | 2016-01-26 |
| 9245793 | Plasma treatment of low-K surface to improve barrier deposition | Ratsamee Limdulpaiboon, Frank Greer, J. Watanabe, Wenxian Zhu | 2016-01-26 |
| 9224644 | Method to control depth profiles of dopants using a remote plasma source | Sandip Niyogi, Amol Joshi, Salil Mujumdar | 2015-12-29 |
| 9176181 | High throughput current-voltage combinatorial characterization tool and method for combinatorial solar test substrates | Yun Wang, Tony P. Chiang | 2015-11-03 |
| 9178145 | Methods for forming resistive switching memory elements | Nitin Kumar, Tony P. Chiang, Zhi-Wen Sun, Jinhong Tong | 2015-11-03 |
| 9175382 | High metal ionization sputter gun | Hong Sheng Yang, Tony P. Chiang, Kent Riley Child, ShouQian Shao | 2015-11-03 |
| 9147841 | Resistive-switching memory element | Tony P. Chiang, Prashant B. Phatak | 2015-09-29 |
| 9103871 | High throughput quantum efficiency combinatorial characterization tool and method for combinatorial solar test substrates | Yun Wang, Tony P. Chiang | 2015-08-11 |
| 9105563 | Method and system of improved uniformity testing | Charlene Chen, Tony P. Chiang, Yun Wang | 2015-08-11 |
| 9023438 | Methods and apparatus for combinatorial PECVD or PEALD | ShouQian Shao, Jingang Su | 2015-05-05 |
| 8987143 | Hydrogen plasma cleaning of germanium oxide surfaces | Ratsamee Limdulpaiboon, Sandip Niyogi, J. Watanabe | 2015-03-24 |
| 8980709 | Resistive-switching memory element | Tony P. Chiang, Prashant B. Phatak | 2015-03-17 |
| 8920618 | Combinatorial processing using high deposition rate sputtering | Hong Sheng Yang, Zhendong Hong | 2014-12-30 |
| 8906207 | Control of film composition in co-sputter deposition by using collimators | Hong Sheng Yang, Tony P. Chiang | 2014-12-09 |