Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8228483 | Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate | Ulrich Loering, Gerd Reisinger, Franz-Josef Stickel, Sonja Schneider, Johann Trenkler +2 more | 2012-07-24 |
| 8107054 | Microlithographic projection exposure apparatus | Michael Totzeck, Wolfgang Singer, Helmut Beierl, Heiko Feldmann, Hans-Juergen Mann +1 more | 2012-01-31 |
| 8081295 | Projection exposure method and projection exposure system therefor | — | 2011-12-20 |
| 8027088 | Catadioptric projection objective with tilted deflecting mirrors, projection exposure apparatus, projection exposure method, and mirror | Ralf Mueller, Wolfgang Singer | 2011-09-27 |
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2010-12-07 |
| 7508489 | Method of manufacturing a miniaturized device | Markus Schwab, Toralf Gruner, Tammo Uitterdijk | 2009-03-24 |
| 7408616 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2008-08-05 |
| 7239447 | Objective with crystal lenses | Alexandra Pazidis, Birgit Kuerz, Christoph Zaczek, Daniel Kraehmer | 2007-07-03 |