| 9971252 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2018-05-15 |
| 9971254 |
Sensor, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2018-05-15 |
| 9939738 |
Lithographic apparatus and an object positioning system |
Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more |
2018-04-10 |
| 9915877 |
Object holder and lithographic apparatus |
Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2018-03-13 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2018-02-20 |
| 9823589 |
Lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2017-11-21 |
| 9785055 |
Object holder and lithographic apparatus |
Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2017-10-10 |
| 9753382 |
Sensor, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2017-09-05 |
| 9740110 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-08-22 |
| 9632435 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2017-04-11 |
| 9575419 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2017-02-21 |
| 9513568 |
Lithographic apparatus |
Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more |
2016-12-06 |
| 9298107 |
Lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2016-03-29 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |
| 9141005 |
Temperature sensing probe, burl plate, lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Johan Gertrudis Cornelis Kunnen, Sander Catharina Reinier Derks |
2015-09-22 |
| 8970822 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2015-03-03 |