Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627221 | Continuous process incorporating atomic layer etching | Masaru Zaitsu, Atsuki Fukazawa | 2017-04-18 |
| 9576790 | Deposition of boron and carbon containing materials | Viljami Pore, Yosuke Kimura, Kunitoshi Namba, Wataru Adachi, Werner Knaepen +2 more | 2017-02-21 |
| 9564314 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2017-02-07 |
| 9564309 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Atsuki Fukazawa, Suvi Haukka | 2017-02-07 |
| 9455138 | Method for forming dielectric film in trenches by PEALD using H-containing gas | Atsuki Fukazawa, Noboru Takamure, Masaru Zaitsu | 2016-09-27 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2016-06-14 |
| 9343297 | Method for forming multi-element thin film constituted by at least five elements by PEALD | Atsuki Fukazawa | 2016-05-17 |
| 9171716 | Method of forming metal oxide hardmask | — | 2015-10-27 |
| 9153441 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2015-10-06 |
| 8924606 | Storage system and data transfer control method | Koji Akiyama, Susumu Tsuruta, Hiroshi Shimmura, Shoji Kato | 2014-12-30 |
| 8901016 | Method of forming metal oxide hardmask | Jeongseok Ha, Shintaro Kaido | 2014-12-02 |
| 8784950 | Method for forming aluminum oxide film using Al compound containing alkyl group and alkoxy or alkylamine group | Atsuki Fukazawa | 2014-07-22 |
| 8679958 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Antti Niskanen, Suvi Haukka, Ryu Nakano +1 more | 2014-03-25 |
| 8669185 | Method of tailoring conformality of Si-containing film | Shigeyuki Onizawa, Woo Jin Lee, Kunitoshi Namba | 2014-03-11 |
| 8572342 | Data transfer device with confirmation of write completion and method of controlling the same | Masahiro Arai, Hiroshi Hirayama, Masanori Takada, Hiroshi Kanayama | 2013-10-29 |
| 8340087 | Storage subsystem | Shuji Nakamura, Akira Fujibayashi, Mutsumi Hosoya | 2012-12-25 |
| 8321622 | Storage system with multiple controllers and multiple processing paths | Shuji Nakamura, Masahiro Arai, Nobuyuki Minowa | 2012-11-27 |
| 8219760 | Storage subsystem and its control method | Nobuyuki Minowa, Naoki Moritoki, Masanori Takada, Masato Shimizu | 2012-07-10 |
| 8103939 | Storage system and data storage method | Osamu Torigoe | 2012-01-24 |
| 8099563 | Storage device and access instruction sending method | Masatomo Ohno, Yasuhiro Igarashi | 2012-01-17 |
| 7833353 | Liquid material vaporization apparatus for semiconductor processing apparatus | Kazunori Furukawahara | 2010-11-16 |
| 7817626 | Storage subsystem | Shuji Nakamura, Akira Fujibayashi, Mutsumi Hosoya | 2010-10-19 |
| 7799134 | Shower plate having projections and plasma CVD apparatus using same | Naoto Tsuji, Hiroki Arai, Yoshinori Morisada, Tamihiro Kobayashi | 2010-09-21 |
| 7789965 | Method of cleaning UV irradiation chamber | Kiyohiro Matsushita, Kenichi Kagami | 2010-09-07 |
| 7697311 | Storage apparatus, controller and control method | Naoki Moritoki | 2010-04-13 |