Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7498242 | Plasma pre-treating surfaces for atomic layer deposition | Devendra Kumar, Kamal Kishore Goundar, Nathanael R. C. Kemeling, Hessel Sprey, Maarten Stokhof | 2009-03-03 |
| 7462245 | Single-wafer-processing type CVD apparatus | Akira Shimizu, Hiroki Kanayama | 2008-12-09 |
| 7460383 | Storage apparatus, controller and control method | Naoki Moritoki | 2008-12-02 |
| 7276123 | Semiconductor-processing apparatus provided with susceptor and placing block | Akira Shimizu, Hiroki Arai, Baiei Kawano, Takayuki Yamagishi | 2007-10-02 |
| 7234476 | Method of cleaning CVD equipment processing chamber | Hirofumi Arai | 2007-06-26 |
| 6921556 | Method of film deposition using single-wafer-processing type CVD | Akira Shimizu, Baiei Kawano, Kazuo Sato | 2005-07-26 |
| 6524955 | Method of forming thin film onto semiconductor substrate | Hiroki Arai | 2003-02-25 |
| 6439154 | Plasma processing apparatus for semiconductors | Baiei Kono | 2002-08-27 |
| 6413887 | Method for producing silicon nitride series film | Hiroki Arai | 2002-07-02 |
| 6187691 | Method of forming film on semiconductor substrate in film-forming apparatus | Hiroki Arai, Yu Yoshizaki | 2001-02-13 |
| 5986587 | Redundant binary code converting circuit and multiplication circuit using same | — | 1999-11-16 |
| 5935649 | Method for manufacturing SiOF films | Satoshi Koizumi, Masaki Yoshimaru, Yukihiro Mori | 1999-08-10 |
| 5890105 | Low bit rate coding system for high speed compression of speech data | Teruo Ishihara | 1999-03-30 |
| 5297946 | Multilayer parison extruder | Toshiji Yoshida, Toshio Kagitani, Keiji Fukuhara | 1994-03-29 |