Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222725 | Moving range setting system and moving range setting method | Kenjiro Yamamoto, Taishi Ueda, Hiroshi Ito | 2025-02-11 |
| 8151814 | Method for controlling flow and concentration of liquid precursor | Akira Shimizu, Akiko Kobayashi | 2012-04-10 |
| 7462245 | Single-wafer-processing type CVD apparatus | Akira Shimizu, Hideaki Fukuda | 2008-12-09 |