Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504702 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau | 2019-12-10 |
| 10448494 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10448495 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10375884 | Self-propelled harvester with front access to crop processing apparatus | Bryan S. Claerhout, Justin Dameron | 2019-08-13 |
| 10312048 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2019-06-04 |
| 10283329 | ICP source for M and W-shape discharge profile control | Anurag Kumar Mishra, John Poulose | 2019-05-07 |
| 10256075 | Gas splitting by time average injection into different zones by fast gas valves | — | 2019-04-09 |
| 10128090 | RF impedance model based fault detection | John C. Valcore, Jr., Nicholas Webb, Peter Muraoka | 2018-11-13 |
| 10103010 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau | 2018-10-16 |
| 9947517 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Rajinder Dhindsa, Sunil Srinivasan, Denis M. Koosau | 2018-04-17 |
| 9793097 | Time varying segmented pressure control | Kyle Spaulding | 2017-10-17 |
| D797691 | Composite edge ring | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, Rajinder Dhindsa, Vedapuram S. Achutharaman +1 more | 2017-09-19 |
| 9123650 | Plasma confinement rings including RF absorbing material for reducing polymer deposition | — | 2015-09-01 |
| 8901935 | Methods and apparatus for detecting the confinement state of plasma in a plasma processing system | John C. Valcore, Jr. | 2014-12-02 |
| 8500952 | Plasma confinement rings having reduced polymer deposition characteristics | Rajinder Dhindsa, Felix Kozakevich, David Trussell | 2013-08-06 |
| 8337662 | Plasma confinement rings including RF absorbing material for reducing polymer deposition | — | 2012-12-25 |
| 8290717 | Methods and apparatus for wafer area pressure control in an adjustable gap plasma chamber | Rajinder Dhindsa | 2012-10-16 |
| 8262922 | Plasma confinement rings having reduced polymer deposition characteristics | Rajinder Dhindsa, Felix Kozakevich, David Trussell | 2012-09-11 |
| 8038436 | Textile curing oven with active cooling | Billy F. McGowan | 2011-10-18 |
| 7951616 | Process for wafer temperature verification in etch tools | Keren Jacobs Kanarik, C. Robert Koemtzopoulos, Bi-Ming Yen | 2011-05-31 |
| 7713379 | Plasma confinement rings including RF absorbing material for reducing polymer deposition | — | 2010-05-11 |
| 7430986 | Plasma confinement ring assemblies having reduced polymer deposition characteristics | Rajinder Dhindsa, Felix Kozakevich, David Trussell | 2008-10-07 |
| 7000418 | Capacitance sensing for substrate cooling | Brian D. Hoffman | 2006-02-21 |
| 6368678 | Plasma processing system and method | Terry Bluck | 2002-04-09 |
| 6228429 | Methods and apparatus for processing insulating substrates | Terry Bluck, Jun Xie, Eric C. Lawson | 2001-05-08 |