Issued Patents All Time
Showing 26–50 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, Leonid Dorf, Rajinder Dhindsa, Olivier Luere | 2022-11-22 |
| 11476145 | Automatic ESC bias compensation when using pulsed DC bias | Linying Cui, Leonid Dorf | 2022-10-18 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11406062 | Agricultural harvester with a feeder house having a locking axle assembly | Steven John Schrag, Rex Schertz | 2022-08-09 |
| 11367593 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | Linying Cui | 2022-06-21 |
| 11289310 | Circuits for edge ring control in shaped DC pulsed plasma process device | Linying Cui | 2022-03-29 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |
| 11276601 | Apparatus and methods for manipulating power at an edge ring in a plasma processing device | Linying Cui | 2022-03-15 |
| 11232933 | Temperature and bias control of edge ring | Linying Cui, Rajinder Dhindsa | 2022-01-25 |
| 11127571 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Sang Ki Nam, Rajinder Dhindsa | 2021-09-21 |
| 11069504 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2021-07-20 |
| 11049760 | Universal process kit | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, Rajinder Dhindsa, Vedapuram S. Achutharaman +1 more | 2021-06-29 |
| 10991556 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, Denis M. Koosau | 2021-04-27 |
| 10923321 | Apparatus and method of generating a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-16 |
| 10916408 | Apparatus and method of forming plasma using a pulsed waveform | Leonid Dorf, Evgeny Kamenetskiy, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2021-02-09 |
| 10791617 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2020-09-29 |
| 10784089 | Temperature and bias control of edge ring | Linying Cui, Rajinder Dhindsa | 2020-09-22 |
| 10763081 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | Linying Cui | 2020-09-01 |
| 10748748 | RF impedance model based fault detection | John C. Valcore, Jr., Nicholas Webb, Peter Muraoka | 2020-08-18 |
| 10685862 | Controlling the RF amplitude of an edge ring of a capacitively coupled plasma process device | — | 2020-06-16 |
| 10685807 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2020-06-16 |
| 10586686 | Peripheral RF feed and symmetric RF return for symmetric RF delivery | Sang Ki Nam, Rajinder Dhindsa | 2020-03-10 |
| 10553404 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Rajinder Dhindsa, Denis M. Koosau | 2020-02-04 |
| 10555412 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra | 2020-02-04 |