| D973737 |
Mainframe of substrate processing system |
Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir |
2022-12-27 |
| D973116 |
Mainframe of substrate processing system |
Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir |
2022-12-20 |
| 11520358 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more |
2022-12-06 |
| 11479855 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi |
2022-10-25 |
| 11456197 |
Systems and methods for providing maintenance access to electronic device manufacturing tools |
Juan Carlos Rocha-Alvarez, Jeffrey C. Hudgens |
2022-09-27 |
| 11424104 |
Plasma reactor with electrode filaments extending from ceiling |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci |
2022-08-23 |
| 11393710 |
Wafer edge ring lifting solution |
Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more |
2022-07-19 |
| 11355321 |
Plasma reactor with electrode assembly for moving substrate |
Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci |
2022-06-07 |
| 11332827 |
Gas distribution plate with high aspect ratio holes and a high hole density |
Sumit Agarwal, Sanjeev Baluja, Chad Peterson |
2022-05-17 |
| 11328938 |
Substrate processing apparatus and methods with factory interface chamber filter purge |
— |
2022-05-10 |
| 11244846 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Jeffrey C. Hudgens, Karuppasamy Muthukamatchi, Nir Merry |
2022-02-08 |
| 11220747 |
Complementary pattern station designs |
Joseph AuBuchon, Sanjeev Baluja, Arkaprava Dan, Hanhong Chen |
2022-01-11 |
