SS

Shau-Lin Shue

TSMC: 22 patents #34 of 2,623Top 2%
Overall (2016): #1,114 of 481,213Top 1%
22
Patents 2016

Issued Patents 2016

Showing 1–22 of 22 patents

Patent #TitleCo-InventorsDate
9530737 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee 2016-12-27
9502261 Spacer etching process for integrated circuit design Ru-Gun Liu, Cheng-Hsiung Tsai, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee +6 more 2016-11-22
9496170 Interconnect having air gaps and polymer wrapped conductive lines Shin-Yi Yang, Hsiang-Huan Lee, Ming-Han Lee, Hsi-Wen Tien 2016-11-15
9484257 Semiconductor devices and methods of manufacture thereof Hsin-Chieh Yao, Chung-Ju Lee, Tien-I Bao 2016-11-01
9466486 Method for integrated circuit patterning Ming-Feng Shieh, Ru-Gun Liu, Hung-Chang Hsieh, Tien-I Bao, Chung-Ju Lee 2016-10-11
9466525 Interconnect structures comprising flexible buffer layers Chao-Hsien Peng, Hsin-Yen Huang, Hsiang-Huan Lee 2016-10-11
9449875 Wafer backside interconnect structure connected to TSVs Ming-Fa Chen, Wen-Chih Chiou 2016-09-20
9437540 Additional etching to increase via contact area Pei-Yi Lin, Chung-Ju Lee 2016-09-06
9431297 Method of forming an interconnect structure for a semiconductor device Yung-Hsu Wu, Cheng-Hsiung Tsai, Yu-Sheng Chang, Chia-Tien Wu, Chung-Ju Lee +4 more 2016-08-30
9418868 Method of fabricating semiconductor device with reduced trench distortions Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2016-08-16
9412649 Method of fabricating semiconductor device Yung-Sung Yen, Chung-Ju Lee, Chun-Kuang Chen, Chia-Tien Wu, Ta-Ching Yu +4 more 2016-08-09
9384994 Method of forming multiple patterning spacer structures Chih Wei Lu, Chung-Ju Lee 2016-07-05
9385029 Method for forming recess-free interconnect structure Chao-Hsien Peng, Hsiang-Huan Lee 2016-07-05
9343400 Dual damascene gap filling process Hsiang-Huan Lee 2016-05-17
9330989 System and method for chemical-mechanical planarization of a metal layer Yung-Hsu Wu, Shih-Kang Fu, Hsin-Chieh Yao, Hsiang-Huan Lee, Chung-Ju Lee +1 more 2016-05-03
9318439 Interconnect structure and manufacturing method thereof Shin-Yi Yang, Hsi-Wen Tien, Ming-Han Lee, Hsiang-Huan Lee 2016-04-19
9318364 Semiconductor device metallization systems and methods Hsiang-Huan Lee, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more 2016-04-19
9305837 Semiconductor arrangement and formation thereof Chia-Tien Wu, Tien-Lu Lin 2016-04-05
9293413 Semiconductor devices and methods of manufacture thereof Hsin-Chieh Yao, Chung-Ju Lee, Tien-I Bao 2016-03-22
9269668 Interconnect having air gaps and polymer wrapped conductive lines Shin-Yi Yang, Hsiang-Huan Lee, Ming-Han Lee, Hsi-Wen Tien 2016-02-23
9252049 Method for forming interconnect structure that avoids via recess Chao-Hsien Peng, Tsung-Min Huang, Hsiang-Huan Lee 2016-02-02
9230911 Interconnect structure and method of forming the same Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Tien-I Bao 2016-01-05