Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384994 | Method of forming multiple patterning spacer structures | Chung-Ju Lee, Shau-Lin Shue | 2016-07-05 |
| 9373586 | Copper etching integration scheme | Chung-Ju Lee, Hsiang-Huan Lee, Tien-I Bao | 2016-06-21 |
| 9312220 | Structure and method for a low-K dielectric with pillar-type air-gaps | Chung-Ju Lee, Tien-I Bao | 2016-04-12 |
| 9291913 | Pattern generator for a lithography system | Chen-Hua Yu, Tien-I Bao, Jaw-Jung Shin, Shy-Jay Lin, Burn Jeng Lin | 2016-03-22 |
| 9275900 | Method of fabricating a semiconductor interconnect structure | Chung-Ju Lee | 2016-03-01 |