Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529271 | Grid refinement method | Wen-Chuan Wang, Burn Jeng Lin, Pei-Yi Liu, Shy-Jay Lin | 2016-12-27 |
| 9519225 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Burn Jeng Lin, Shy-Jay Lin, Wen-Chuan Wang | 2016-12-13 |
| 9390891 | Apparatus for charged particle lithography system | Shih-Chi Wang, Tsung-Chih Chien, Hui-Min Huang, Shy-Jay Lin, Burn Jeng Lin | 2016-07-12 |
| 9329488 | Grid refinement method | Wen-Chuan Wang, Shy-Jay Lin, Pei-Yi Liu, Burn Jeng Lin | 2016-05-03 |
| 9291913 | Pattern generator for a lithography system | Chen-Hua Yu, Tien-I Bao, Chih Wei Lu, Shy-Jay Lin, Burn Jeng Lin | 2016-03-22 |
| 9229332 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Burn Jeng Lin, Shy-Jay Lin, Wen-Chuan Wang | 2016-01-05 |