Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529271 | Grid refinement method | Burn Jeng Lin, Jaw-Jung Shin, Pei-Yi Liu, Shy-Jay Lin | 2016-12-27 |
| 9519225 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Burn Jeng Lin, Shy-Jay Lin, Jaw-Jung Shin | 2016-12-13 |
| 9436787 | Method of fabricating an integrated circuit with optimized pattern density uniformity | Jyuh-Fuh Lin, Pei-Yi Liu, Cheng-Hung Chen, Shy-Jay Lin, Burn Jeng Lin | 2016-09-06 |
| 9436788 | Method of fabricating an integrated circuit with block dummy for optimized pattern density uniformity | Jyuh-Fuh Lin, Pei-Yi Liu, Cheng-Hung Chen, Shy-Jay Lin, Burn Jeng Lin | 2016-09-06 |
| 9329488 | Grid refinement method | Shy-Jay Lin, Pei-Yi Liu, Jaw-Jung Shin, Burn Jeng Lin | 2016-05-03 |
| 9229332 | Systems and methods for high-throughput and small-footprint scanning exposure for lithography | Burn Jeng Lin, Shy-Jay Lin, Jaw-Jung Shin | 2016-01-05 |