Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318364 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more | 2016-04-19 |
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Chung-En Kao, Tien-Chen Hu, Mao-Lin Kao, Kuo-Fu Chien | 2016-03-08 |