Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318364 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng +3 more | 2016-04-19 |
| 9279179 | Multi coil target design | Ming-Chin Tsai, Bo-Hung Lin, Chin-Hsiang Lin | 2016-03-08 |
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Tien-Chen Hu, Mao-Lin Kao, Kuo-Fu Chien, Keith Kuang-Kuo Koai | 2016-03-08 |