Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Chung-En Kao, Tien-Chen Hu, Mao-Lin Kao, Keith Kuang-Kuo Koai | 2016-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281221 | Ultra-high vacuum (UHV) wafer processing | Chung-En Kao, Tien-Chen Hu, Mao-Lin Kao, Keith Kuang-Kuo Koai | 2016-03-08 |