Issued Patents 2016
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519285 | Systems and associated methods for tuning processing tools | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2016-12-13 |
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Nai-Han Cheng, Chi-Ming Yang | 2016-09-20 |
| 9449864 | Systems and methods for fabricating and orienting semiconductor wafers | Chin-Ming Lin, Wan-Lai Chen, Chia-Hung Huang, Chi-Ming Yang | 2016-09-20 |
| 9425286 | Source/drain stressor having enhanced carrier mobility and method for manufacturing same | Jeff J. Xu, Pang-Yen Tsai | 2016-08-23 |
| 9403254 | Methods for real-time error detection in CMP processing | James Jeng-Jyi Hwang, Bo-I Lee, Chi-Ming Yang | 2016-08-02 |
| 9377503 | Semiconductor test structures | An-Chun Tu, Chen-Ming Huang, Chih-Jen Wu | 2016-06-28 |
| 9366969 | Methodology for implementing enhanced optical lithography for hole patterning in semiconductor fabrication | Chia-Chu Liu, Kuei-Shun Chen, Norman Chen, Vencent Chang | 2016-06-14 |
| 9368379 | Systems and methods of controlling semiconductor wafer fabrication processes | Shih-Hung Chen, Ying Xiao | 2016-06-14 |
| 9368452 | Metal conductor chemical mechanical polish | Soon-Kang Huang, Han-Hsin Kuo, Chi-Ming Yang, Shwang-Ming Jeng | 2016-06-14 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2016-05-24 |
| 9305815 | Automated material handling system and method for semiconductor manufacturing | Chi-Feng Tung, Mao-Lin Kao, Hsiang Yin Shen | 2016-04-05 |
| 9299593 | Semiconductor device cleaning method and apparatus | Ming-Hsi Yeh, Kuo-Sheng Chuang, Ying-Hsueh Chang Chien, Chi-Ming Yang | 2016-03-29 |
| 9279179 | Multi coil target design | Ming-Chin Tsai, Bo-Hung Lin, Chung-En Kao | 2016-03-08 |
| 9250286 | Semiconductor test structures | An-Chun Tu, Chen-Ming Huang, Chih-Jen Wu | 2016-02-02 |
| 9250619 | Systems and methods of automatic boundary control for semiconductor processes | Chih-Wei Hsu, Mei-Jen Wu, Yen-Di Tsen, Jo Fei Wang, Jong-I Mou | 2016-02-02 |
| 9242342 | Manufacture and method of making the same | Bo-I Lee, Huang Soon Kang, Chi-Ming Yang | 2016-01-26 |
| 9234278 | CVD conformal vacuum/pumping guiding design | You-Hua Chou, Chih-Tsung Lee, Chia-Ho Chen | 2016-01-12 |