Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519285 | Systems and associated methods for tuning processing tools | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2016-12-13 |
| 9477219 | Dynamic compensation in advanced process control | Chih-Wei Hsu, Jin-Ning Sung, Shin-Rung Lu | 2016-10-25 |
| 9466101 | Detection of defects on wafer during semiconductor fabrication | Chun-Hsien Lin, Liu Bo-Tsun, Chin-Ti Ko, Wu Cheng-Hung, Kuo-Hung Chao +3 more | 2016-10-11 |
| 9442392 | Scanner overlay correction system and method | Yen-Di Tsen, Yi-Ping Hsieh, Chen-Yen Huang, Shin-Rung Lu | 2016-09-13 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2016-05-24 |
| 9323244 | Semiconductor fabrication component retuning | Keung Hui, Cheng Yen-Wei | 2016-04-26 |
| 9250619 | Systems and methods of automatic boundary control for semiconductor processes | Chih-Wei Hsu, Mei-Jen Wu, Yen-Di Tsen, Jo Fei Wang, Chin-Hsiang Lin | 2016-02-02 |